Vacuum Compatible Motorized Stages 960-0060V
← Back to product family

Vacuum Compatible Motorized Stages 960-0060V SKU: 960-0060V-06

• Narrow • Compact design • Resolution 0.31 µm (1/8 step) • High guide way accuracy • Lead screw pitch 0.5 mm • X-Y-Z configurations available • Non vacuum version Vacuum Compatible Motorized Stages are equipped with vacuum compatible stepper motor. Stages stack in X-Y…

Variant specifications

Specification Value
Description travel range - 50 mm

Shared product specifications

These specifications apply across the Vacuum Compatible Motorized Stages 960-0060V product family.

Lead screw pitch 0.5 mm
Resolution in full step 2.5 µm
Max. speed 5 mm / s
Load capacity Horizontal Vertical 8 kg 3 kg
Vacuum, Torr 10⁻⁶
Motor connector DB9(M)
Stepper motor VSS42
Wiring scheme of the motor VSS42 bipolar
Design Voltage of the motor VSS42, V 42
Phase Current of the motor VSS42, A 1.2
Holding Torque of the motor VSS42, Nm 0.13
Detent Torque of the motor VSS42, mNm 5
Phase Resistance of the motor VSS42, Ohm 1.7
Inductance of the motor VSS42, mH 3
Steps / Revolution of the motor VSS42 200(1.8°)
Assemblies of the motor VSS42 X-Y Z To flat surface directly 810-0160V 820-0115V
Snap-action limit switch two end switches
Type Pushed is "closed"

Product brochures

Shared documentation for the complete product family.