Semiconductor

Laser processing sits at the heart of semiconductor manufacturing — wafer dicing, stealth dicing, excimer annealing and inspection systems all depend on UV and DUV optics that hold their performance under continuous industrial duty. At 355 nm and below, coating absorption and damage threshold decide tool uptime.

Eksma Optics supplies high-LIDT UV optics, F-theta and beam delivery lenses, and LBO / CLBO harmonic crystals for semiconductor laser tools — with low-absorption coatings from 190 nm and full in-house metrology for lot-to-lot traceability. We offer flexible production, from custom engineering samples to dedicated OEM lines for tool builders.

Contact us
Silicon wafer under a laser processing head

What we build for semiconductor applications

Optics, coatings, crystals and assemblies engineered for each semiconductor application — to your spec, from prototype to volume.

Wafer dicing, scribing & grooving

UV/green DPSS laser processing of Si, SiC, sapphire.

Eksma Optics offers

  • High LIDT and low absorption coatings for laser optics operating at 220-400 nm ranges
Stealth dicing

Sub-surface IR (1064 nm) modification of silicon wafers.

Eksma Optics offers

  • Extreme LIDT AR and HR coatings for optics used for laser beam collimation, focusing and delivery to the targets
Wafer inspection & metrology

Defect detection, overlay and CD measurement systems.

Eksma Optics offers

  • Low absorption coatings for UV range from 190 nm using EBE and IAD technologies
  • NOTCH, band-pass and custom filter coatings (OD > 6.0 achievable)
  • CNC manufacturing of spherical and aspherical lenses with interferometric certification
Excimer laser processing & annealing

DUV line-beam systems for LTPS display and semiconductor annealing.

Eksma Optics offers

  • High LIDT and low absorption coatings for laser optics operating at 220-400 nm ranges
Advanced packaging

Microvia drilling, TSV, wafer-level marking.

Eksma Optics offers

  • CNC manufacturing of aspherical, axicon and free-form lenses up to 200 mm diameter
  • Optical system design (Zemax OpticStudio) and cleanroom assembly of scanning lenses and beam expanders

A vertically integrated EU manufacturer for semiconductor

We are actively seeking strategic partnerships to invest and expand our manufacturing capacity — creating dedicated production lines of optical components and assemblies for your tailor-made semiconductor solutions.

100% Vertical integration
7300 m² New facility
40 years Of expertise

In-house at every stage

1
In-house design & R&D

Expert team: 10+ seasoned scientists, each with a decade-plus of experience.

  • Optical systems design
  • Optomechanical design
  • Electronics design
2
Manufacturing & assembly

End-to-end traceability with full control from raw materials to final testing.

  • Optical materials processing
  • Precision lens manufacturing
  • Advanced UV, VIS, NIR, IR coatings
  • Specialised optics assembly
3
Quality control & testing

Multi-stage quality assurance with stringent procedures for reliability.

  • Environmental durability
  • First Article Inspection (FAI)
  • Innovative testing solutions
See manufacturing capabilities

Certified excellence & compliance for semiconductor

Accreditations and certifications that let partners qualify us quickly.

Industry accreditation

  • Placeholder — add semiconductor accreditations before production.

Supply chain

  • Registered on Integrity Next supply chain platform
  • Listed on Jaggaer.com as a supplier to leading photonics companies

ISO certifications

  • ISO 9001:2015 certified
  • ISO 14001:2015 certified

Ready to partner with Eksma Optics?

Leverage our 40+ years of photonics expertise for your semiconductor applications — from R&D prototypes to high-volume production.

Contact us